This can be proved using the following universal property of $A'$: if $f \colon A \to S$ is any $R$-algebra homomorphism where $S$ is reduced, then $f$ factors uniquely as $f = g \circ p$ where $p \colon A \to A/\sqrt{0} = A'$ is the canonical homomorphism. Or more briefly: any $R$-algebra homomorphism from $A$ to a reduced $R$-algebra factors uniquely through $A'$. (I will let you work this out, but feel free to ask in the comments if you need some hints.)
The characterization of $A'$ above makes it unique up to unique isomorphism: If $T$ is any other algebra with a homomorphism $q \colon A \to T$ satisfying the same universal property (with $p$ replaced by $q$), then $T \cong A'$ (via a unique isomorphism that respects $p$ and $q$).
Thus, to prove that $(A \otimes_R B)' \cong (A' \otimes_R B')'$, it is enough to show that $(A' \otimes_R B')'$ equipped with the canonical homomorphism $q \colon A \otimes_R B \to A' \otimes_R B' \to (A' \otimes_R B')'$ satisfies the same universal property as $(A \otimes_R B)'$.
So let $S$ be a reduced ring with an algebra homomorphism $f \colon A \otimes_R B \to S$. The canonical homomorphisms $A,B \to A \otimes_R B$ induce $A,B \to A \otimes_R B \to S$. Since $S$ is reduced, these must factor uniquely through $A'$ and $B'$. This induces $A' \otimes_R B' \to S$. But again, as the latter algebra is reduced (and the former may not be), this factors uniquely through $g \colon (A' \otimes_R B')' \to S$. It's now a small chore to check that this provides a unique factorization $f = gq$.