Prove that if $M$ is a Noetherian module (over an arbitrary ring $R$), then $\operatorname{Supp}M$ is a closed Noetherian subspace of $\operatorname{Spec}R$.
This is the exercise 10 of chapter 6 in An Introduction to Commutative Algebra by Atiyah and McDonald. I have known that it is closed since $\operatorname{Supp}M=V(\operatorname{Ann}M)$. But why it is Noetherian?