With a diagonal matrix $D$ and exponential power series expansions:
\begin{align*} D &= \begin{pmatrix} \lambda_1 & 0 & \cdots & 0 \\ 0 & \lambda_2 & \cdots & 0 \\ \vdots & \vdots & \ddots & 0 \\ 0 & 0 & \cdots & \lambda_n \\ \end{pmatrix} \\ e^{Dt} &= \sum\limits_{n=0}^\infty \frac{1}{n!} (Dt)^n \\ e^{\lambda_i t} &= \sum\limits_{n=0}^\infty \frac{1}{n!} (\lambda_i t)^n \\ \end{align*}
Show that:
\begin{align*} e^{Dt} &= \begin{pmatrix} e^{\lambda_1 t} & 0 & \cdots & 0 \\ 0 & e^{\lambda_2 t} & \cdots & 0 \\ \vdots & \vdots & \ddots & 0 \\ 0 & 0 & \cdots & e^{\lambda_n t} \\ \end{pmatrix} \\ \end{align*}